1. AFM (Atomic Force Microscopy)
* Sample size : 40 X 40㎜
* XY scanner
- Closed loop XY scan
- Scan size : 30×30×6 um (for XYZ)
- Resolution : < 0.2 nm RMS for XY
0.01 nm for Z
* Contact mode AFM
* Noncontact mode AFM
* Lateral force microscopy
* FD spectroscopy
* Advanced Nanolithography Tool
- Vector scan nanolithography
- Raster scan nanolithography
- Voltage lithography
- Dynamic plowing mode/scratching mode/ indentation mode/ constant mod
2. Inkjet Patterning System(single nozzle)
* Substrate : 100 X 100㎜
* 특이사항 : Mannual ink supply system
3. Inkjet Patterning System (multi-nozzle)
* Head : multi Nozzle 128 Channel S-series
* Stage : X step, Y Servo Stage
* Repeatability : ±5㎛
* Substrate : 200 X 200㎜
* 특이사항 : Mannual ink supply system
4. Plasma Treatment System
* Plasma source
- Capacitively coupled plasma
- 600 W, 13.56 Hz
* Chamber size : 6 inch (150 mm)
* Substrate Cooling, Heation
- Max.Temperature : 300˚c
* Vacuum Pumping
- Mechanical Rotary Pump
* Gas Supply
- Mass Flow Controller : 4 ch
5. 3D Non-contact Surface Profiler
1. 구성 및 사용명세서
- Interferometric Objectives : 5 Lens
- Z축 측정 영역 : 0-180um
- Lateral Resolution : 0.2 ~4um
- Tip /Tilt : ±6°
- Workpiece Stage
2. 용도
- 광간섭을 이용한 3차원 표면형상 측정
- 확장된 측정 Range (5mm Option)
- Auto Focus 기능(Option)
- 대면적 대응
- Line Profile 기능
6. Contact angle analyzer ( Phoenix 300 - SEO )
- unit size : 650*300*450
- weight : 28kg
- Max. sample size (L*H*W)in mm : 200x150x infinity
- Zoom : 6.4 fold
- Focus : Internal,+-6mm
- Resolution : 768x576 NTSC, 16M color
- Max measuring speed : 30 fr/s(frame grabber) or 90fr/s(Digital camera)
- Dispensing type : Automatic, semi-auto & Manual control
- Pendant drop analysis, Surface energy, Continuation capture images
- Contact angle : 0~180 deg.,+-0.1deg. accuracy
- Surface and interfacial tension : 10-1~103 mN/m
- Temperature measurement : External
7. Oil-less Pump & Compressor
* Max. vacuum: 650mm Hg
* Max. flow rate: 23L/Min
* Motor Rotation: 1400RPM
* Horse Power: 1/6HP
* Pole: 4P
* Net Weight: 5.2kg
* Port Thread: 1/8PS
8. Viscometer
* Viscosity Range cP: 1M ~ 6M
* Speeds (RPM): 0.01 ~ 200
* Numbers of Increments: 54
* Numbers of Spindles Supplied: 4
* Accuracy: ±1.0% of range
* Repeatability: ±0.2%
9. Power Supply
* Line Regulation: 3mA
* Load Regulation: 3mA - 3mA
* Other Features: 3mV
* Output 1, Volts/ Max, Current: 30V - 3A
* Total Power: 90W
* Type: DC
10. Function Generator
* Frequency Range: 0.3Hz to 3Hz(7 ranges)
* Amplitude: >10Vp-p(into 50 ohm load)
* Impedance: 50 ohm ±10%
* Attenuator: -20dB±1dB x 2
* DC Offset: <-5V ~ >5V(into 50 ohm load)
* Display: 6digit LED
11. Osilloscope
* Frequency Range/Bandwidth: 100MHz
* Max. Vertical Sensitivity: 5V/div
* MIn. Vertical Sensitivity: 10mv/div
* Number of Channers: 4 CH
* Record Length: "2,500pts"
* Sample Rate: 1GSa/s
