• Sample size : 40 X 40㎜

• XY scanner

- Closed loop XY scan

- Scan size : 30×30×6 um (for XYZ)

- Resolution : < 0.2 nm RMS for XY

                          0.01 nm for Z

• Contact mode AFM

• Noncontact mode AFM

• Lateral force microscopy

• FD spectroscopy

• Advanced Nanolithography Tool

- Vector scan nanolithography

- Raster scan nanolithography

- Voltage lithography

- Dynamic plowing mode/scratching mode/ indentation mode/ constant mode 

• Substrate : 100 × 100㎜

• 특이사항 : Manual ink supply system 

• Head : multi Nozzle 128 Channel S-series

• Stage : X step, Y Servo Stage

• Repeatability : ±5㎛

• Substrate : 200 X 200㎜

• 특이사항 : Manual ink supply system 

• Plasma source

- Capacitively coupled plasma

- 600 W, 13.56 Hz

• Chamber size : 6 inch (150 mm)

• Substrate Cooling, Heating

- Max.Temperature : 300˚c

• Vacuum Pumping

- Mechanical Rotary Pump

• Gas Supply 

- Mass Flow Controller : 4 ch 

• 구성 및 사용명세서

  - Interferometric Objectives : 5 Lens

  - Z축 측정 영역 : 0-180um

  - Lateral Resolution : 0.2 ~4um

  - Tip /Tilt : ±6°

  - Workpiece Stage

• 용도

  - 광간섭을 이용한 3차원 표면형상 측정

  - 확장된 측정 Range (5mm Option)

  - Auto Focus 기능(Option)

  - 대면적 대응

  - Line Profile 기능

• Unit size : 650*300*450

• Weight : 28kg

• Max. sample size (L*H*W)in mm : 200x150x infinity

• Zoom : 6.4 fold

• Focus : Internal,+-6mm

• Resolution : 768x576 NTSC, 16M color

• Max measuring speed : 30 fr/s(frame grabber) or 90fr/s(Digital camera)

• Dispensing type : Automatic, semi-auto & Manual control

• Pendant drop analysis, Surface energy, Continuation capture images

• Contact angle : 0~180 deg.,+-0.1deg. accuracy

• Surface and interfacial tension : 10-1~103 mN/m

• Temperature measurement : External

• Max. vacuum:  650mm Hg

• Max. flow rate:  23L/Min

• Motor Rotation:  1400RPM

• Horse Power:   1/6HP

• Pole:   4P

• Net Weight:   5.2kg

• Port Thread:   1/8PS 

• Viscosity Range cP:   1M ~ 6M

• Speeds (RPM):   0.01 ~ 200

• Numbers of Increments:   54

• Numbers of Spindles Supplied:   4

• Accuracy:   ±1.0% of range

• Repeatability:   ±0.2%

• Line Regulation:   3mA

• Load Regulation:   3mA - 3mA

• Other Features:   3mV

• Output 1, Volts/ Max, Current:   30V - 3A

• Total Power:   90W

• Type:   DC

• Frequency Range:  0.3Hz to 3Hz(7 ranges)

• Amplitude:   >10Vp-p(into 50 ohm load)

• Impedance:   50 ohm ±10%

• Attenuator:   -20dB±1dB x 2

• DC Offset:   <-5V ~ >5V(into 50 ohm load)

• Display:   6digit LED

• Frequency Range/Bandwidth:  100MHz

• Max. Vertical Sensitivity:   5V/div

• Min. Vertical Sensitivity:   10mv/div

• Number of Channers:   4 CH

• Record Length:   "2,500pts"

• Sample Rate:   1GSa/s